V.M.Puzikov
Received June 1, 1998
Raman scattering spectra in hydrogen-free diamond-like carbon
films (DLF) with high sp-3 fraction content (Csp-3)
have been studied. The films were deposited from carbon ion beams
of 30-500 eV energy, the ion current density was 0.1-1 mA/cm2.The
Raman scattering method yas been shown to be suitable for the structure
identification and the sp-3 fraction content determinations
at sufficiently high Csp-3 values. Therewith, the most reliable
results have been obtained for films deposited from mass-separated
carbon ion beams at the energy (E) of 60-200 eV.