The Raman scattering in diamond-like carbon films deposited from mass-separated ion beams

V.M.Puzikov


Institute for Single Crystals, National Academy of Sciences of Ukraine, 60 Lenin Ave., 310001 Kharkiv, Ukraine

Received June 1, 1998

Raman scattering spectra in hydrogen-free diamond-like carbon films (DLF) with high sp-3 fraction content (Csp-3) have been studied. The films were deposited from carbon ion beams of 30-500 eV energy, the ion current density was 0.1-1 mA/cm2.The Raman scattering method yas been shown to be suitable for the structure identification and the sp-3 fraction content determinations at sufficiently high Csp-3 values. Therewith, the most reliable results have been obtained for films deposited from mass-separated carbon ion beams at the energy (E) of 60-200 eV.

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