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Funct. Mater. 2014; 21 (2): 171-175.

http://dx.doi.org/10.15407/fm21.02.171

Investigation of damaged layer formed at mechanical treatment of sapphire using three-crystal X-ray diffraction method

V.F.Tkachenko, S.I.Kryvonogov, A.T.Budnikov, O.A.Lukienko, E.A.Vovk

Institute for Single Crystals, STC "Institute for Single Crystals", National Academy of Sciences of Ukraine, 60 Lenin Ave., 61001 Kharkiv, Ukraine

Abstract: 

The methods of three-crystal X-ray diffractometry were used for investigating structure perfection in surface-adjacent damaged layer (DL) formed in the process of mechanical and chemical-mechanical treatment of sapphire crystals with the surface orientation {0001} {11-20}. Analysis of the diffraction reflection curves made it possible to establish the structure and character of distortions in the DL. There was established the mean-square disorientation between the fragments, which allowed to characterize the defects structure of the surface-adjacent DL.

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