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Funct. Mater. 2018; 25 (3): 505-515.

doi:https://doi.org/10.15407/fm25.03.505

Application of carbon as a barrier layer in Sc/Si multilayer X-ray mirrors

Yu.P.Pershyn, I.Yu.Devizenko, V.S.Chumak, A.Yu.Devizenko, V.V.Kondratenko

National Technical University Kharkiv Polytechnic Institute, 2 Kyrpychov Str., 61002 Kharkiv, Ukraine

Abstract: 

X-ray reflectometry in the hard X-ray region (λ = 0.154 nm) was used to investigate the barrier properties of carbon layers 0.2-1.3 nm thick in Sc/Si multilayer X-ray mirrors (MXMs) deposited by DC magnetron sputtering. Precise measurement of the MXM period makes it possible to record volumetric changes in the Sc/C/Si MXM with an accuracy better than 0.01 nm, thus the interaction of the carbon layers with the material of the matrix layers was revealed. The formation of carbide (Si-on-Sc interface) and carbide-silicide (Sc-on-Si nterface) layers was found. The reflectivity of the Sc/C/Si mirrors at the wavelength of ~ 46.9 nm was estimated.

Keywords: 
multilayer X-ray mirror, carbon barrier layer, layer interaction, EUV region, reflectivity.
References: 

1. Yu.A.Uspenskii, V.E.Levashov, A.V.Vinogradov et al., Opt. Lett., 23, 771 (1998).

2. S.Bajt, J.B.Alameda, W.M.Clift et al., Opt. Eng., 41, 1797 (2002).

3. S.Braun, H.Mai, M.Moss et al., Jpn. J. Appl. Phys., 41, 4074 (2002).

4. S.Yulin, F.Schafers, T.Feigl et al., Proc. SPIE, 5193, 155 (2004).

5. J.Gautier, F.Delmotte, M.Roulliay et al., Proc. SPIE, 5963, 56930X (2005).

6. C.D,Macchietto, B.R.Benware, J.J.Rocca, Opt. Lett., 24, 1115 (1999)

7. A.V.Vinogradov, J.J.Rocca, Quant. Electron., 33, 7 (2003).

8. H.Takenaka, T.Kawamura, J. Electron. Spectrosc. Relat. Phenom., 80, 381 (1996).

9. M.Moss, T.Bottger, S.Braun et al., Thin Solid Films, 468, 322 (2004).

10. A.V.Penkov, E.N.Zubarev, O.V.Poltseva et al., PAST, No. 4, 157 (2006).

11. A.Kubec, J.Maser, P.Formanek et al., Appl. Phys. Lett. 110, 111905 (2017).

12. D.L.Windt, Comput. Phys., No. 4, 360 (1998).

13. Yu.A.Uspenskii, J.F.Seely, N.L.Popov et al., J. Opt. Soc. Am. A, 21, 298 (2004).

14. M.Fernandez-Perea, J.I.Larruquert, J.A.Aznarez et al., J. Opt. Soc. Am. A, 23, 2880 (2006).

15. Y.P.Pershyn, E.N.Zubarev, D.L.Voronov et al., J. Phys. D: Appl. Phys., 42, 125407 (2009).

16. D.L.Windt, S.Donguy, J.Seely et al., Appl. Opt., 43, 1835 (2004).

17. Specular X-ray Optics, ed. by A.V.Vinogradov, Mashinostroenie, Leningrad (1989) [in Russian].

18. R.Pottgen, W.Jeitschko, Inorg. Chem., 30, 427 (1991).

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