Specific features of structure transformations in high-disperse SnO2 thin films


Kharkiv State Polytechnical University,21 Frunze St., 310002 Kharkiv, Ukraine

Received November 11, 1997

Specific features of crystallization and recrystallization processes in SnO2 films curring during their annealing have been investigated. Formation possibility of some thermostable high-disperse states in thin SnO2 films of non-equilibrium structure has been shown as well as the possibility to make use of such structure states to create gas sensors of desorption-semiconductor type with high operating stability.

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