The use of triode sputtering scheme for preparation of refractory
metal carbide coatings
O.V.Sobol, E.A.Sobol, A.A.Podtelezhnikov, S.T.Roshchenko
Kharkiv State Polytechnical University, 21 Frunze St.,
61002 Kharkiv, Ukraine
Received November 15, 1999
The formation features of phase composition and substructure
characteristics for refractory carbides produced from ion-plasma beams
using triode sputtering have been considered taking tungsten carbide
as an example, alpha-W2C, alpha
-WC and alpha-WC+C
being used as targets. The high-temperature beta-WC phase has
been found to be present in most coatings. This causes formation of
two-phase composites (beta-WC+alpha-WC, beta-WC+alpha-W2C)
or single-phase beta-WC coatings at lowered substrate temperatures
(Ts
). The formation of fcc beta-WC is due to a high
non-equilibrium formation process of ion-plasma coatings.The use
of triode sputtering allows to produce stable a-WC coatings
under their relatively low density beam and Ts elevation
up to 450 oC. In this case, relaxation processes occur on
the surface due to high energies of particles involved into the carbide
formation under their relatively low density.
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