V.A.Novikov
Received March 25, 1999
Dependence of electrical properties on technologic parameters
has been studied for gas-sensitive SnO2 layers prepared by
magnetron sputtering. It has been shown that it is possible to control
the initial conductance and gas sensitivity of those layers. A method
has been proposed to improve the reproducibility of the mentioned
parameters on the level necessary for practical application of adsorbing
semiconductor gas sensors based on thin SnO2 films.