Funct. Mater. 2015; 22 (4): 487-493.
Effect of substrate temperature on structural and substructural properties of MgO thin films
[1] Sumy State University, 2 Rymsky-Korsakov Str., 40007 Sumy, Ukraine
[2] Institute of Applied Physics, National Academy of Sciences of Ukraine, 58 Petropavliska Str., 40030 Sumy, Ukraine
[3] Department of Physics, Sogang University, Seoul 121-742, South Korea
In this paper we have studied the influence of substrate temperature deposition on structural and substructural characteristics of magnesium oxide films by X-ray diffraction analysis. The thin films of MgO were prepared by spray pyrolysis technique from magnesium chloride solution. We have established the phase composition, the lattice constant, coherent scattering domain size, microstrain level of the films. The optimal conditions for the application of the homogeneous single-phase films of stoichiometric composition were identified.
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